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    Niobium pentanitride (Nb5N6) microbolometers achieve room-temperature infrared detection at 2 µm. This breakthrough offers a low-cost method for developing large-scale focal plane arrays for infrared imaging.

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    Area of Science:

    • Materials Science
    • Infrared Technology
    • Nanotechnology

    Background:

    • Infrared detection is crucial for various applications, including thermal imaging and spectroscopy.
    • Existing microbolometers often require cryogenic cooling or have limitations in sensitivity and response time.
    • Development of room-temperature infrared detectors operating in the short-wave infrared (SWIR) range is highly desirable.

    Purpose of the Study:

    • To demonstrate room-temperature thermal detection at 2 µm using a novel Nb5N6 microbolometer.
    • To evaluate the photothermal response and performance characteristics of Nb5N6 microbolometers.
    • To explore a cost-effective technique for fabricating large-scale infrared focal plane arrays.

    Main Methods:

    • Fabrication and characterization of two types of Nb5N6 microbolometers.
    • Suspension of Nb5N6 microwires to minimize thermal conductance.
    • Measurement of optical voltage responsivity, noise equivalent power, and detectivity at 2 µm.
    • Evaluation of response time for the microbolometer devices.

    Main Results:

    • Successful demonstration of room-temperature thermal detection at 2 µm with Nb5N6 microbolometers.
    • Achieved a significant reduction in thermal conductance by a factor of 39 through device suspension.
    • Measured optical voltage responsivity of 61.5 V/W.
    • Obtained a noise equivalent power of 8.5 × 10⁻¹¹ W/√Hz and detectivity (D*) of 2.0 × 10⁷ cm√Hz /W.
    • Demonstrated a fast response time of 0.17 ms for a 10 × 30-µm² device.

    Conclusions:

    • Nb5N6 is a promising material for room-temperature SWIR microbolometers.
    • The suspended microwire design effectively enhances thermal isolation and device performance.
    • This technology presents a simple, low-cost approach for scalable silicon-based focal plane array development for infrared detection.