Planar double-slot antenna integrated into a Nb₅N₆ microbolometer THz detector

Area of Science:

• Terahertz (THz) technology
• Detector physics
• Antenna engineering

Background:

• Terahertz detectors are crucial for various applications.
• Optimizing antenna design is key to improving detector sensitivity and performance.
• Niobium nitride (Nb5N6) is a promising material for microbolometer detectors.

Purpose of the Study:

• To propose and demonstrate a new planar double-slot antenna for Nb5N6 microbolometer THz detectors.
• To evaluate the antenna's coupling efficiency and signal focusing capabilities.
• To assess the performance of integrated Nb5N6 detectors with the novel antenna design.

Main Methods:

• Antenna design and electromagnetic simulations.
• Micro-fabrication of Nb5N6 microbolometer THz detectors.
• Integration of planar double-slot antennas with detectors.
• Experimental characterization of detector responsivity and noise equivalent power.
• Investigation of antenna performance in a tunable Fabry-Perot cavity.

Main Results:

• The planar double-slot antenna exhibits high coupling efficiency and effective focusing of THz signals.
• Integrated Nb5N6 detectors achieved a maximum optical voltage responsivity (Ro) of 113 V/W at 0.643 THz.
• The noise equivalent power (NEP) was measured to be 44pW/√Hz.
• Detector performance remained stable despite changes in cavity spacing, indicating robustness.

Conclusions:

• The proposed planar double-slot antenna offers high coupling efficiency and ease of integration for THz detectors.
• This antenna design significantly enhances the performance of Nb5N6 microbolometer THz detectors.
• The developed antenna shows substantial potential for widespread application in terahertz detection systems.