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Updated: Feb 6, 2026
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High-resolution, High-speed, Three-dimensional Video Imaging with Digital Fringe Projection Techniques
Published on: December 3, 2013
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Precision fringe period metrology using an LSQ sine fit algorithm.
Applied Optics
|August 18, 2018
Summary
This study introduces a precise method for measuring fringe periods, essential for high-precision grating fabrication. The developed technique achieves high accuracy and repeatability, crucial for advanced displacement measurement systems.
Area of Science:
- Optics and Photonics
- Metrology
Background:
- High-precision grating fabrication is critical for displacement measurement.
- Accurate fringe period measurement is essential for grating fabrication, particularly in scanning beam interference lithography.
Purpose of the Study:
- To introduce a procedure for measuring the fringe periods of interference beams.
- To discuss the precision of signal acquisition and processing for fringe period measurement.
Main Methods:
- The procedure involves signal acquisition and signal processing.
- Analysis of precision in both the acquisition configuration and processing algorithm.
Main Results:
- Experiments yielded an average fringe period of 564.374 nm.
- A standard deviation of 1.5 pm and repeatability of 2.6 ppm were achieved.
Conclusions:
- The developed measurement procedure provides a solid foundation for high-precision grating fabrication.
- The achieved precision in fringe period measurement supports advancements in grating-based displacement measurement techniques.
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