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    Area of Science:

    • Optical metrology
    • Synchrotron radiation technology
    • Precision engineering

    Background:

    • Angular-measurement-based Stitching Interferometry (ASI) combines autocollimators and white light interferometers for synchrotron mirror metrology.
    • Previous work established the foundational ASI technique.
    • Understanding measurement repeatability is crucial for high-precision applications.

    Purpose of the Study:

    • To evaluate the measurement repeatability of the ASI technique under various conditions.
    • To analyze the influence of scanning time, scanning length, and system drift on repeatability.
    • To compare ASI's angle-measuring stitching with deflectometry's slope integration.

    Main Methods:

    • Analytical derivation of height repeatability based on slope noise.
    • Simulation of virtual scans using real experimental data from autocollimator and interferometer.
    • Testing under conditions with and without system drift, varying scanning time and length.

    Main Results:

    • A relationship between measurement repeatability and scanning time at constant speed was predicted.
    • System drift error was identified as the dominant factor affecting the current ASI system's repeatability.
    • The similarity between ASI's angle-measuring stitching and deflectometry's slope integration was explored.

    Conclusions:

    • ASI technique shows promise for synchrotron mirror metrology.
    • Minimizing system drift is critical for enhancing the repeatability of ASI systems.
    • Further research can optimize ASI parameters for improved precision.