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Nitridated Ru/B4C multilayer mirrors with improved interface structure, zero stress, and enhanced hard X-ray

Qiushi Huang, Yang Liu, Yang Yang

    Optics Express
    |August 23, 2018
    PubMed
    Summary

    Nitrogen incorporation into Ruthenium/Boron Carbide (Ru/B4C) multilayers significantly reduces compressive stress and enhances reflectance for hard X-ray monochromators. This technique improves mirror performance for X-ray applications.

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