Dealing with image shifting in 3D ToF-SIMS depth profiles.

Daniel J Graham1, Lara J Gamble1

  • 1NESAC/BIO, Department of Bioengineering, University of Washington, Seattle, Washington 98195.

Biointerphases
|September 7, 2018
PubMed
Summary

Depth profiling with time-of-flight secondary ion mass spectrometry (ToF-SIMS) can cause image shifts. Three methods—software correction, sample height adjustment, and beam position adjustment—were found to accurately compensate for these shifts, improving 3D representations.

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