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Published on: February 15, 2016
Dealing with image shifting in 3D ToF-SIMS depth profiles.
Daniel J Graham1, Lara J Gamble1
1NESAC/BIO, Department of Bioengineering, University of Washington, Seattle, Washington 98195.
Depth profiling with time-of-flight secondary ion mass spectrometry (ToF-SIMS) can cause image shifts. Three methods—software correction, sample height adjustment, and beam position adjustment—were found to accurately compensate for these shifts, improving 3D representations.
Area of Science:
- Materials Science
- Analytical Chemistry
- Surface Science
Background:
- Gas cluster ion beams offer high sputter efficiency and low damage for depth profiling in organic samples using time-of-flight secondary ion mass spectrometry (ToF-SIMS).
- Fixed ion source geometry in ToF-SIMS leads to lateral image shifts during depth profiling, especially beyond one micron.
- These shifts distort 3D representations of the sample surface.
Purpose of the Study:
- To present and evaluate three methods for compensating lateral image shifts in ToF-SIMS depth profiling.
- To enable more accurate 3D reconstructions of organic sample surfaces.
- To provide solutions for accurate depth profiling beyond one micron.
Main Methods:
- Post-acquisition software correction of image shifts.
- In-situ sample height correction during data acquisition.
- In-situ beam position adjustment during data acquisition.
Main Results:
- All three presented methods successfully compensated for image shifting in ToF-SIMS depth profiles.
- Correction resulted in more accurate 3D data representation, restoring spherical features that appeared ellipsoidal.
- Software shifting is convenient but may crop features; hardware methods are recommended for profiles deeper than a few microns.
Conclusions:
- Effective compensation of lateral image shifts is crucial for accurate 3D imaging in ToF-SIMS depth profiling.
- A combination of hardware and software correction methods offers a comprehensive solution for various sample types and profiling depths.
- Provided software scripts and tutorials facilitate the implementation of post-acquisition correction.
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