Manipulation of random telegraph signals in a silicon nanowire transistor with a triple gate

Manipulation of carrier densities at the single electron level is inevitable in modern silicon based transistors to ensure reliable circuit operation with sufficiently low threshold-voltage variations. However, previous methods required statistical analysis to identify devices which exhibit random telegraph signals (RTSs), caused by trapping and de-trapping of a single electron. Here, we show that we can deliberately introduce an RTS in a silicon nanowire transistor, with its probability distribution perfectly controlled by a triple gate. A quantum dot (QD) was electrically defined in a silicon nanowire transistor with a triple gate, and an RTS was observed when two barrier gates were negatively biased to form potential barriers, while the entire nanowire channel was weakly inverted by the top gate. We could successfully derive the energy levels in the QD from the quantum mechanical probability distributions and the average lifetimes of RTSs. This study reveals that we can manipulate individual electrons electrically, even at room temperature, and paves the way to use a charged state for quantum technologies in the future.