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Updated: Feb 5, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

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Single-resonance silicon nanobeam filter with an ultra-high thermo-optic tuning efficiency over a wide continuous

Yong Zhang, Yu He, Qingming Zhu

    Optics Letters
    |September 14, 2018
    PubMed

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