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Thermomechanical Noise Characterization in Fully Monolithic CMOS-MEMS Resonators

Rafel Perelló-Roig1, Jaume Verd2, Sebastià Bota3

  • 1System Electronic Group (Physics Department), Universitat de les Illes Balears, 07122 Palma (Balearic Islands), Spain. rafel.perello@uib.es.

Sensors (Basel, Switzerland)
|September 19, 2018
PubMed

Keywords:
CMOS-MEMSMEMS resonatorssensorsthermomechanical noise

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