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Editorial for the Special Issue on Development of CMOS-MEMS/NEMS Devices
1Electronic Systems Group (GSE), University of the Balearic Islands, E-07122 Palma (Illes Balears), Spain. jaume.verd@uib.eu.
Micromachines
|April 27, 2019
Summary
Micro and nanoelectromechanical systems (M/NEMS) are crucial for adding functions to integrated circuits (ICs) beyond traditional scaling. These devices are essential for the More-Than-Moore technological advancement.
Area of Science:
- Materials Science and Engineering
- Electrical Engineering
- Nanotechnology
Background:
- Micro and nanoelectromechanical systems (M/NEMS) are pivotal for advancing integrated circuits (ICs) in the More-Than-Moore era.
- These devices are key components for enabling functionalities beyond conventional semiconductor scaling.
Discussion:
- The integration of M/NEMS into ICs represents a significant shift from traditional Moore's Law scaling.
- Exploring the synergistic potential of M/NEMS and ICs is critical for future technological roadmaps.
Key Insights:
- M/NEMS offer a pathway to enhanced functionality in semiconductor devices.
- The International Technology Roadmap for Semiconductors highlights the importance of M/NEMS for future IC development.
Outlook:
- Continued research and development in M/NEMS will drive innovation in the semiconductor industry.
- The successful integration of M/NEMS will define the next generation of intelligent electronic systems.
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