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Removal of carbon contamination in ETEM by introducing Ar during electron beam irradiation

T Tokunaga1, K Saito2, K Kuno1

  • 1Department of Quantum Engineering, Nagoya University, Furo-cho, chikusa-ku, Nagoya, Aichi, Japan.

Journal of Microscopy
|September 26, 2018
PubMed

Keywords:
ArgonETEMcarboncontaminationionisation

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