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An N-Heterocyclic Carbene Based Silver Precursor for Plasma-Enhanced Spatial Atomic Layer Deposition of Silver Thin

Nils Boysen1, Tim Hasselmann2, Sarah Karle1

  • 1Inorganic Materials Chemistry, Chair of Inorganic Chemistry II, Ruhr University Bochum, Universitätsstraße 150, 44801, Bochum, Germany.

Angewandte Chemie (International Ed. in English)
|September 28, 2018
PubMed

Keywords:
N-heterocyclic carbenesplasma-enhanced atomic layer depositionsilverthin films

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