Related Experiment Video
Updated: Feb 4, 2026
08:21
Quantitative Hardness Measurement by Instrumented AFM-indentation
Published on: November 22, 2016
10.2K
A new precise positioning method for piezoelectric scanner of AFM
Yanyan Wang1, Sen Wu2, Linyan Xu2
1Tianjin Key Laboratory of Information Sensing and Intelligent Control, Tianjin University of Technology and Education, 300222 Tianjin, China.
Ultramicroscopy
|October 6, 2018
Summary
This study introduces a novel dynamic polynomial fitting method to model and compensate for piezoelectric scanner (PZT) hysteresis in Atomic Force Microscopy (AFM). This significantly enhances PZT positioning accuracy for high-precision nanoscale measurements.
Area of Science:
- Nanoscience and Nanotechnology
- Metrology
- Control Systems Engineering
Background:
- Atomic Force Microscopy (AFM) is crucial for nanoscale imaging and manipulation.
- Achieving high-precision measurements in AFM is limited by the positioning accuracy of piezoelectric scanners (PZT).
- PZT hysteresis introduces significant nonlinear errors, challenging precise positioning.
Purpose of the Study:
- To develop a method for modeling and compensating PZT hysteresis.
- To improve the positioning accuracy of the lateral PZT in AFM systems.
- To achieve nanoscale measurement precision.
Main Methods:
- A new dynamic polynomial fitting method was developed to model PZT hysteresis.
- An inverse model of the PZT was created using the dynamic polynomial fitting.
- The inverse model was integrated as a feedforward input with a fuzzy feedback controller.
Main Results:
- The dynamic polynomial fitting method effectively models PZT hysteresis.
- The combined feedforward and feedback control strategy significantly corrects nonlinear errors.
- The positioning accuracy of the lateral PZT was improved, achieving 1 nm accuracy.
Conclusions:
- The proposed method successfully compensates for PZT hysteresis.
- This advancement enhances the precision of AFM measurements.
- The technique offers a pathway to highly accurate nanoscale positioning.
Related Concept Videos
01:13Velocity and Position by Integral Method
8.1K
If acceleration as a function of time is known, then velocity and position functions can be derived using integral calculus. For constant acceleration, the integral equations refer to the first and second kinematic equations for velocity and position functions, respectively.
Consider an example to calculate the velocity and position from the acceleration function. A motorboat is traveling at a constant velocity of 5.0 m/s when it starts to decelerate to arrive at the dock. Its acceleration is...
Consider an example to calculate the velocity and position from the acceleration function. A motorboat is traveling at a constant velocity of 5.0 m/s when it starts to decelerate to arrive at the dock. Its acceleration is...
8.1K
01:34Velocity and Position by Graphical Method
10.3K
Velocity and position can be calculated from the known function of acceleration as a function of time. The total area under the acceleration-time graph and the velocity-time graph gives the change in velocity and position, respectively. In the case of an airplane, its acceleration is tracked using the inertial navigation system. The pilot provides the input of the airplane's initial position and velocity before takeoff. The inertial navigation system then uses the acceleration data to...
10.3K
03:37Uncertainty in Measurement: Accuracy and Precision
101.8K
Scientists typically make repeated measurements of a quantity to ensure the quality of their findings and to evaluate both the precision and the accuracy of their results. Measurements are said to be precise if they yield very similar results when repeated in the same manner. A measurement is considered accurate if it yields a result that is very close to the true or the accepted value. Precise values agree with each other; accurate values agree with a true value.
101.8K
02:32Position-effect Variegation
7.1K
In 1928, a German botanist Emil Heitz observed the moss nuclei with a DNA binding dye. He observed that while some chromatin regions decondense and spread out in the interphase nucleus, others do not. He termed them euchromatin and heterochromatin, respectively. He proposed that the heterochromatin regions reflect a functionally inactive state of the genome. It was later confirmed that heterochromatin is transcriptionally repressed, and euchromatin is transcriptionally active chromatin.
7.1K
01:52Accuracy and Precision
15.5K
Scientists typically make repeated measurements of a quantity to ensure the quality of their findings and to evaluate both the precision and the accuracy of their results. Measurements are said to be precise if they yield very similar results when repeated in the same manner. A measurement is considered accurate if it yields a result that is very close to the true or the accepted value. Precise values agree with each other; accurate values agree with a true value. Highly accurate...
15.5K
01:03Serial Position Effect
550
The serial position effect is a cognitive phenomenon where individuals are more likely to recall the first and last items in a list compared to those in the middle. This effect is divided into the primacy effect and the recency effect. The primacy effect is observed when the initial items in a list are remembered better. This occurs because these items are rehearsed more frequently or receive more elaborative processing, allowing them to be encoded into long-term memory more effectively. For...
550