A new precise positioning method for piezoelectric scanner of AFM

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Updated: Feb 4, 2026

Quantitative Hardness Measurement by Instrumented AFM-indentation
08:21

Quantitative Hardness Measurement by Instrumented AFM-indentation

Published on: November 22, 2016

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Yanyan Wang1, Sen Wu2, Linyan Xu2

  • 1Tianjin Key Laboratory of Information Sensing and Intelligent Control, Tianjin University of Technology and Education, 300222 Tianjin, China.

Ultramicroscopy
|October 6, 2018
PubMed

Keywords:
AFMDynamic polynomial fittingHysteresisPositioning accuracy

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