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Measurement of X-ray Beam Coherence along Multiple Directions Using 2-D Checkerboard Phase Grating
Published on: October 11, 2016
Wolfgang Voegeli1, Chika Kamezawa1,2, Etsuo Arakawa1
1Department of Physics, Tokyo Gakugei University, 4-1-1 Nukuikita-machi, Koganei, Tokyo 184-8501, Japan.
This study introduces a novel X-ray reflectometer for rapid thin film analysis. The instrument accurately measures specular X-ray reflectivity curves, enabling precise characterization of material surfaces.
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