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Electron microscopy determination of crystallographic polarity of aluminum nitride thin films

Noriyuki Kuwano1, Jesbains Kaur2, Siti Rahmah1

  • 1Microscopy Laboratory, Malaysia-Japan International Institute of Technology, Universiti Teknologi Malaysia, Jalan Sultan Yahya Petra, 54100 Kuala Lumpur, Malaysia.

Micron (Oxford, England : 1993)
|October 16, 2018
PubMed

Keywords:
Aluminum nitrideCrystallographic polarityInversion domain boundaryTransmission electron microscopyWurtzite structure

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