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Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
11:14

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

Published on: May 28, 2016

Scanning electron microscope observation of dislocations in semiconductor and metal materials

Noriyuki Kuwano1, Masaru Itakura, Yoshiyuki Nagatomo

  • 1Art, Science and Technology Center for Cooperative Research, Kyushu University, Kasuga, Fukuoka, Japan. kuwano@astec.kyushu-u.ac.jp

Journal of Electron Microscopy
|July 3, 2010
PubMed

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