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Beryllium-Based Multilayer Mirrors and Filters for the Extreme Ultraviolet Range
Chkhalo Nikolay1, Lopatin Alexey1, Nechay Andrey1
1Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia.
Journal of Nanoscience and Nanotechnology
|October 18, 2018
Summary
Beryllium-based multilayer mirrors and filters show enhanced reflectivity for EUV applications. These durable beryllium (Be) optics maintain performance over time, crucial for solar corona studies.
Area of Science:
- Materials Science
- Optics
- Astrophysics
Background:
- Multilayer mirrors (MLM) and transmission filters (TF) are essential for EUV spectroscopy.
- Current MLMs require improved reflectivity and spectral resolution for solar corona observation.
Purpose of the Study:
- To evaluate beryllium (Be) as a material for EUV MLMs and TFs.
- To enhance reflectivity and spectral resolution of MLMs for solar corona studies.
Main Methods:
- Systematic studies of Mo/Be, Be/Al, and Be/Si/Al MLMs.
- Investigation of free-standing beryllium films.
- Long-term observation of MLM reflectivity (20 months).
Main Results:
- Be-containing MLMs exhibit superior reflectivity compared to Be-free counterparts.
- MLM reflectivity remained stable over 20 months.
- Free-standing Be films demonstrate comparable mechanical strength and high transmittance stability to Al films.
Conclusions:
- Beryllium is a promising material for high-reflectivity EUV optics.
- Be-based MLMs offer significant advantages for EUV applications, including solar physics.
- The developed Be-based filters and mirrors are stable and durable.
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