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Vapor Pressure02:34

Vapor Pressure

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When a liquid vaporizes in a closed container, gas molecules cannot escape. As these gas phase molecules move randomly about, they will occasionally collide with the surface of the condensed phase, and in some cases, these collisions will result in the molecules re-entering the condensed phase. The change from the gas phase to the liquid is called condensation. When the rate of condensation becomes equal to the rate of vaporization, neither the amount of the liquid nor the amount of the vapor...
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Calorimetry is a technique used to measure the amount of heat involved in a chemical or physical process or to measure the heat transferred to or from a substance. The heat is exchanged with a calibrated and insulated device called the calorimeter. Calorimetry experiments are based on the assumption that there is no heat exchange between the insulated calorimeter and the external environment. The well-insulated calorimeters prevent the transfer of heat between the calorimeter and its external...
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Most pressure gauges, like those on scuba tanks, are calibrated to read zero at atmospheric pressure. Readings from such gauges are called the gauge pressure, which is the pressure relative to atmospheric pressure. When the pressure inside the tank exceeds atmospheric pressure, the gauge reports a positive value. Some gauges are designed to measure negative pressure. For example, many physics experiments must take place in a vacuum chamber, a rigid chamber from which some of the air is pumped...
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There are many examples of pressure in fluids in everyday life, such as in relation to blood (high or low blood pressure) and in relation to weather (high- and low-pressure weather systems). A given force can have a significantly different effect, depending on the area over which the force is exerted. For instance, a force applied to an area of 1 mm2 has a pressure that is 100 times greater than the same force applied to an area of 1 cm2. That's why a sharp needle is able to poke through...
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Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
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A LN/Si-Based SAW Pressure Sensor.

Pascal Nicolay1, Hugo Chambon2, Gudrun Bruckner3

  • 1Carinthian Tech Research (CTR AG), Europastrasse 12, 9524 Villach, Austria. pascal.nicolay@ctr.at.

Sensors (Basel, Switzerland)
|October 19, 2018
PubMed
Summary
This summary is machine-generated.

This study developed a novel implantable Surface Acoustic Wave (SAW) pressure sensor using a Lithium Niobate (LN) membrane. While achieving good pressure accuracy, temperature-induced stress caused response discontinuities, requiring further solutions.

Keywords:
LN/SiSAW pressure sensormultilayer substratethin LN membraneswafer-bonding

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Area of Science:

  • Materials Science
  • Sensor Technology
  • Microelectromechanical Systems (MEMS)

Background:

  • Surface Acoustic Wave (SAW) sensors offer passive, wireless operation.
  • Developing implantable SAW pressure sensors requires precise fabrication of thin membranes.
  • Lithium Niobate (LN) is a key material for SAW devices, but its processing presents challenges.

Purpose of the Study:

  • To develop and characterize a novel SAW-based implantable pressure sensor.
  • To investigate the fabrication of a 30 μm-thick LN membrane for the sensor.
  • To analyze and address observed performance issues like temperature sensitivity and response discontinuities.

Main Methods:

  • Fabrication involved wafer bonding of LN/Si, grinding/polishing to achieve 30 μm LN thickness.
  • Deposition of 2.45 GHz SAW Reflective Delay-Lines (R-DL) using e-beam and optical lithography.
  • Characterization using a dedicated setup to test pressure and temperature responses.

Main Results:

  • Achieved satisfactory pressure accuracy of ±0.56 mbar.
  • Observed discontinuities in the response curve and residual temperature sensitivity.
  • Thermo-mechanical strain and stress in the LN/Si structure, particularly buckling effects around 43 °C, were identified as causes.

Conclusions:

  • The developed SAW sensor shows promise for implantable pressure sensing.
  • Thermo-mechanical effects in the bimorph LN/Si structure significantly impact sensor performance.
  • Further research is needed to mitigate these effects and improve sensor reliability.