A 250 μm × 57 μm Microscale Opto-electronically Transduced Electrodes (MOTEs) for Neural Recording

Recording neural activity in live animals in vivo with minimal tissue damage is one of the major barriers to understanding the nervous system. This paper presents the technology for a tetherless opto-electronic neural interface based on 180 nm CMOS circuits, heterogeneously integrated with an AlGaAs diode that functions as both a photovoltaic and light emitting diode. These microscale opto-electrically transduced electrodes (MOTEs) are powered by and communicate through an optical interface, simultaneously enabling high temporal-resolution electrical measurements without a tether or a bulky RF coil. The MOTE presented here is 250 μm × 57 μm, consumes 1 μW of electrical power, and is capable of capturing and encoding neural signals before transmitting the encoded signals. The measured noise floor is as low as 15 μV_RMS at a 15 kHz bandwidth.