An accurate theory of X-ray coplanar multiple SRMS diffractometry

The article reports an accurate theory of X-ray coplanar multiple diffraction for an experimental setup that consists of a generic synchrotron radiation (SR) source, double-crystal monochromator (M) and slit (S). It is called for brevity the theory of X-ray coplanar multiple SRMS diffractometry. The theory takes into account the properties of synchrotron radiation as well as the features of diffraction of radiation in the monochromator crystals and the slit. It is shown that the angular and energy dependence (AED) of the sample reflectivity registered by a detector has the form of a convolution of the AED in the case of the monochromatic plane wave with the instrumental function which describes the angular and energy spectrum of radiation incident on the sample crystal. It is shown that such a scheme allows one to measure the rocking curves close to the case of the monochromatic incident plane wave, but only using the high-order reflections by monochromator crystals. The case of four-beam (220)(331)({\overline {11}}1) diffraction in Si is considered in detail.