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A Platform for Mechano(-Electrical) Characterization of Free-Standing Micron-Sized Structures and Interconnects

Angel Savov1, Shivani Joshi2, Salman Shafqat3

  • 1Department of Microelectronics, Delft University of Technology, 2628 CD Delft, The Netherlands. angel.savov@philips.com.

Micromachines
|November 6, 2018
PubMed

Keywords:
MEMSelectrical characterizationfree standing interconnectsmechanical characterizationstretchable electronicsstretchable interconnects

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