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Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
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Fundamental Study for a Graphite-Based Microelectromechanical System

Junji Sone1, Mutsuaki Murakami2, Atsushi Tatami3

  • 1Faculty of Engineering, Tokyo Polytechnic University, Atsugi 243-0297, Japan. sone@cs.t-kougei.ac.jp.

Micromachines
|November 6, 2018
PubMed
Summary

Researchers developed a novel carbon-based microelectromechanical system (MEMS) using graphite. This process yielded high-performance MEMS devices with improved Q values, demonstrating a simple yet effective structure.

Keywords:
HOPGcantilevercarbon-MEMSdoubly clamped beamgraphite sheetresonance frequency

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