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Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope

Jian Yang1,2,3, Chaowei Si4, Fan Yang5,6

  • 1Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China. yangjian@semi.ac.cn.

Micromachines
|November 6, 2018
PubMed

Keywords:
aluminum nitridecantilevergyroscopemicroelectromechanical systems (MEMS)piezoelectric effectsimulation

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