Jian Yang
5PUBLICATIONS
1CO-AUTHORS
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Publications (5)
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|Sep 07, 2019
A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer.Jian Yang, Meng Zhang, Yurong He
|Jun 26, 2019
Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication.Meng Zhang, Jian Yang, Yurong He
|Jan 02, 2019
Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via.Meng Zhang, Jian Yang, Yurong He
|Jan 02, 2019
Research on Wafer-Level MEMS Packaging with Through-Glass Vias.Fan Yang, Guowei Han, Jian Yang
|Nov 06, 2018
Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope.Jian Yang, Chaowei Si, Fan Yang
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