Meng Zhang
2PUBLICATIONS
1CO-AUTHORS
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Publications (2)
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|Sep 07, 2019
A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer.Jian Yang, Meng Zhang, Yurong He
|Jun 26, 2019
Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication.Meng Zhang, Jian Yang, Yurong He
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