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Forced flow atomic layer deposition of TiO2 on vertically aligned Si wafer and polysulfone fiber: Design and efficacy

Mrinalini Mishra1, Chia-Yen Chan2, Chi-Chung Kei2

  • 1Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu 300, Taiwan.

The Review of Scientific Instruments
|November 8, 2018
PubMed

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