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A table-top EUV focusing optical system with high energy density using a modified Schwarzschild objective and a

Zhe Zhang1, Wenbin Li1, Qiushi Huang1

  • 1MOE Key Laboratory of Advanced Micro-Structured Materials, No. 1239 Siping Road, 200092 Shanghai, China.

The Review of Scientific Instruments
|November 8, 2018
PubMed

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