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Progress in Research of Flexible MEMS Microelectrodes for Neural Interface
Long-Jun Tang1,2,3, Ming-Hao Wang4,5,6, Hong-Chang Tian7,8,9
1National Key Laboratory of Science and Technology on Micro/Nano Fabrication Laboratory, Shanghai Jiao Tong University, Shanghai 200240, China. tanglongjun@sjtu.edu.cn.
Micromachines
|November 8, 2018
Summary
Flexible microelectrodes fabricated using Micro-electro-mechanical Systems (MEMS) offer advantages for neural interfaces. These advanced electrodes improve performance and safety for understanding neural systems and brain diseases.
Area of Science:
- Biomedical Engineering
- Nanotechnology
- Materials Science
Background:
- Micro-electro-mechanical Systems (MEMS) fabrication enables diverse microelectrode designs for biomedical applications.
- Flexible MEMS microelectrodes surpass traditional silicon or metal electrodes in weight, volume, tissue conformity, and cost.
- Neural interfaces are crucial for electrical stimulation and recording in research, diagnosis, and treatment.
Purpose of the Study:
- To review key technologies in flexible MEMS microelectrodes for neural interfaces.
- To discuss advancements in design, fabrication, fluidic integration, and interface modification.
- To explore future directions for enhanced electrode performance and safety.
Main Methods:
- Review of recent literature on flexible MEMS microelectrode technologies.
- Analysis of design and fabrication techniques.
- Examination of electrode-tissue interface modification strategies.
Main Results:
- Flexible MEMS microelectrodes offer superior characteristics for neural interfacing.
- Key technologies include advanced fabrication, fluidic channels, and interface modifications.
- Future developments focus on transparent, stretchable, and multi-functional electrodes.
Conclusions:
- Flexible MEMS microelectrodes represent a significant advancement in neural interface technology.
- Continued innovation in fabrication and interface design will enhance electrode efficacy and safety.
- Integration of microfabrication, biomedical engineering, and nanotechnology will advance neural system and brain disease research.
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