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Self-Compensated Quad-Functional Microsensor for Human-Machine Multi-Dimensional Interaction
Hao Zheng1,2, Guoke Li1, Yao Tan1
1School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu, China.
Abstract:
Advanced human-machine interfaces urgently require flexible, miniaturized sensors that can realize multi-dimensional sensing modalities while suppressing cross‑modal interference. Here, we develop a flexible microsensor that achieves self-compensated quad‑functional sensing of strain, pressure, liquid-state water molecules, and proximity within an effective compact footprint of 9 mm × 10 mm. Through spatial structural isolation, functional unit multiplexing, and a synergistic strategy of multi‑valued mapping analysis, the sensor enables independent signal readout and crosstalk compensation under concurrent mechanical and moisture stimuli. Under simultaneous stretching and compression, anisotropic deformations driven by the Poisson effect establish a one‑to‑one multi‑valued mapping with planar and parallel‑plate capacitance values, allowing determination of strain and pressure. The exceptional phase‑selective hydrophilicity of silk‑fibroin and distinct dielectric responses of functional materials reduce interference between liquid-state water-molecule sensing and mechanical sensing. As proof‑of‑concept applications, we demonstrate mute communication encoding via motion recognition and an AI‑driven respiratory monitor that achieves high accuracy in keyword recognition. This work establishes a scalable design paradigm for multifunction independent flexible microsensors, offering a promising pathway toward next‑generation wearable electronics and intelligent human-machine interactions.