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Substrate Temperature Dependent Properties of Sputtered AlN:Er Thin Film for In-Situ Luminescence Sensing of Al/AlN

Liping Fang1, Yidong Jiang2, Shengfa Zhu3

  • 1Institute of Materials, China Academy of Engineering Physics, Mianyang 621700, China. fanglp26@163.com.

Materials (Basel, Switzerland)
|November 9, 2018
PubMed

Keywords:
aluminum nitrideerbium dopingluminescence sensingmagnetron sputtering

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