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A CMOS MEMS Humidity Sensor Enhanced by a Capacitive Coupling Structure

Jian-Qiu Huang1, Baoye Li2, Wenhao Chen3

  • 1Key Laboratory of MEMS of the Ministry of Education, Southeast University, Sipailou 2, Nanjing 210096, China. hjq@seu.edu.cn.

Micromachines
|November 9, 2018
PubMed

Keywords:
CMOS MEMScapacitive humidity sensorcoupling electrodenanowires

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