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Novel Capacitive Sensing System Design of a Microelectromechanical Systems Accelerometer for Gravity Measurement

Zhu Li1, Wen Jie Wu2, Pan Pan Zheng3

  • 1MOE Key Laboratory of Fundamental Physical Quantities Measurement, School of Physic, Huazhong University of Science and Technology, Wuhan 430074, China. lizhu@hust.edu.cn.

Micromachines
|November 9, 2018
PubMed

Keywords:
MEMScapacitive sensing system designhigh resolutionhigh-precision measurementlarge dynamic rangethree dimensional (3D)

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