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Simulation Study of Inertial Micro-Switch as Influenced by Squeeze-Film Damping and Applied Acceleration Load

Yingchun Peng1,2, Zhiyu Wen3,4, Dongling Li5,6

  • 1Microsystem Research Center, Chongqing University, Chongqing 400044, China. pyc@cqu.edu.cn.

Micromachines
|November 9, 2018
PubMed

Keywords:
MEMSaccelerationcontact bouncecontact timeinertial switchresponse timesqueeze-film dampingthreshold acceleration

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