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Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators
Han Du1, Fook Siong Chau2, Guangya Zhou3
1Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117575. du_han@u.nus.edu.
Micromachines
|November 9, 2018
Summary
This review explores mechanically-tunable silicon photonic devices, highlighting micro/nano-electro-mechanical systems (MEMS/NEMS) actuators for tuning waveguides, resonators, and cavities. Future directions include plasmonics and optomechanics for advanced light control.
Area of Science:
- Photonics and Materials Science
- Micro/Nano-Electro-Mechanical Systems (MEMS/NEMS)
- Optoelectronics
Background:
- Recent advancements in silicon photonics have focused on developing tunable devices.
- Micro/nano-electro-mechanical systems (MEMS/NEMS) offer precise mechanical control for photonic applications.
- Passive silicon photonic devices like waveguides, couplers, and resonators are key components in integrated photonic circuits.
Purpose of the Study:
- To review and compare the tuning mechanisms of various passive silicon photonic devices integrated with MEMS/NEMS actuators.
- To discuss the applications of these mechanically-tunable photonic devices.
- To explore future development trends, including plasmonics and optomechanics.
Main Methods:
- Literature review of research published primarily within the last decade.
- Selective elaboration and comparison of tuning mechanisms and their results.
- Analysis of state-of-the-art studies in mechanically-tunable plasmonics and on-chip optomechanics.
Main Results:
- Various passive silicon photonic devices (waveguides, couplers, ring/disk resonators, photonic crystal cavities) can be effectively tuned using MEMS/NEMS actuators.
- The review provides a comparative analysis of different tuning mechanisms and their performance.
- Emerging areas like plasmonics and optomechanics show promise for enhanced light confinement and control.
Conclusions:
- Mechanically-tunable silicon photonics, enabled by MEMS/NEMS, offers significant potential for advanced optical devices.
- Future research directions point towards plasmonic and optomechanical approaches for novel functionalities.
- Continued development in this field is expected to drive innovation in integrated photonics.
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