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Miniaturization and High-Density Arrangement of Microcantilevers in Proximity and Tactile Sensor for Dexterous

Ryoma Araki1, Takashi Abe2, Haruo Noma3

  • 1Graduate School of Science and Technology, Niigata University, 8050 Ikarashi 2 no-cho, Nishi-ku, Niigata 950-2181, Japan. f16b078e@mail.cc.niigata-u.ac.jp.

Micromachines
|November 15, 2018
PubMed

Keywords:
microcantileverproximity sensorslipping detectiontactile sensor

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