A Novel Self-Calibration Method and Experiment of MEMS Gyroscope Based on Virtual Coriolis Force

This paper proposes an effective method to calibrate the microelectromechanical systems (MEMS) vibratory gyroscope based on the virtual Coriolis force. This method utilizes a series of voltage signals to simulate the Coriolis force input, and the gyroscope output is monitored to obtain the scale factor characteristics of the gyroscopes. The scale factor and bias parameters of the gyroscope can be calibrated conveniently and efficiently in the sense-mode open loop. The calibration error of the scale factor based on the turntable and the virtual Coriolis force method is only 1.515%, which proves the correction of the method proposed in this paper. Meanwhile, the non-linearity and bias value of the turntable and the virtual Coriolis force method are 742 ppm and 42.04 mV and 3389 ppm and 0.66 mV, respectively.