Design, Simulation and Experimental Study of the Linear Magnetic Microactuator
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Published on: September 26, 2017
Hanlin Feng1, Xiaodan Miao2, Zhuoqing Yang3
1College of Mechanical Engineering, Shanghai University of Engineering Science, Shanghai 201620, China. m010216123@sues.edu.cn.
Abstract:
This paper reports the design, simulation and experimental study of a linear magnetic microactuator for portable electronic equipment and microsatellite high resolution remote sensing technology. The linear magnetic microactuator consists of a planar microcoil, a supporter and a microspring. Its bistable mechanism can be kept without current by external permanent magnetic force, and can be switched by the bidirectional electromagnetic force. The linearization and threshold of the bistable mechanism was optimized by topology structure design of the microspring. The linear microactuator was then fabricated based on non-silicon technology and the prototype was tested. The testing results indicated that the bistable mechanism was realized with a fast response of 0.96 ms, which verified the simulation and analysis.
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