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Updated: Feb 2, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

On Frequency-Based Interface Circuits for Capacitive MEMS Accelerometers.

Zhiliang Qiao¹, Boris A Boom², Anne-Johan Annema³

¹IC Design Group, Faculty of Electrical Engineering, Mathematics and Computer Science, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands. z.qiao@utwente.nl.

|November 15, 2018

Summary

This summary is machine-generated.

Frequency-based readout circuits offer an alternative to charge-based methods for capacitive MEMS accelerometers. Phase noise fundamentally limits resolution, with charge-based circuits excelling in noise performance and frequency-based circuits showing potential for lower power consumption.

Keywords:

MEMS accelerometer bandwidth capacitive frequency interface noise oscillator power readout

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Area of Science:

Electrical Engineering
Sensor Technology
Microelectromechanical Systems (MEMS)

Background:

Conventional capacitive MEMS accelerometers utilize charge-based interface circuits.
Frequency-based readout techniques present a promising alternative with unique advantages and challenges.

Purpose of the Study:

To derive fundamental resolution limits for frequency-based readout techniques imposed by phase noise.
To compare the trade-offs between noise, power dissipation, and bandwidth for frequency-based and charge-based switched-capacitor (SC) readouts.

Main Methods:

Overview of basic operating principles, properties, and challenges of frequency-based readout techniques.
Derivation of closed-form analytical formulas for comparing noise, power, and bandwidth.
Benchmarking of LC-oscillator-based frequency readout against conventional SC readout.

Main Results:

Phase noise is identified as a fundamental limit to the resolution of frequency-based readout techniques.
Charge-based readout circuits are more suitable for optimizing noise performance at a given bandwidth.
Frequency-based techniques show potential for power consumption optimization, particularly when flicker phase noise is mitigated.

Conclusions:

A fair comparison framework using derived analytical formulas is established.
The choice between charge-based and frequency-based readouts depends on specific optimization goals (noise vs. power).
Further research into mitigating flicker phase noise can enhance the viability of frequency-based techniques for MEMS accelerometers.