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Spin Rate Effects in a Micromachined Electrostatically Suspended Gyroscope
Boqian Sun1, Shunyue Wang2, Yidong Tan3
1Department of Precision Instrument, Tsinghua University, Beijing 100084, China. sunboqian@mail.tsinghua.edu.cn.
Sensors (Basel, Switzerland)
|November 15, 2018
Summary
Optimizing the spin rate of microelectromechanical systems (MEMS) gyroscopes significantly enhances performance. Operating at an optimal spin rate improves angular rate sensor accuracy and stability.
Area of Science:
- Engineering
- Physics
- Materials Science
Background:
- Spin rate is critical for high-speed spinning-rotor gyroscope performance.
- Microelectromechanical systems (MEMS) gyroscopes offer compact angular rate sensing capabilities.
Purpose of the Study:
- To investigate the impact of spin rate on MEMS gyroscope performance indicators.
- To derive theoretical models for scale factor and measurement range.
- To propose a testing strategy for analyzing spin rate effects.
Main Methods:
- Theoretical modeling of scale factor and measurement range.
- Experimental validation of theoretical predictions.
- Analysis of gyroscope output noise in relation to control loop voltage.
Main Results:
- Experimental scale factor measurements align with theoretical predictions.
- Gyroscope output noise is proportional to the squared drive voltage of the control loop.
- Different spin rates reveal the influence of the rotation control loop.
Conclusions:
- Spin rate significantly affects MEMS gyroscope performance metrics.
- An optimal spin rate can be identified to improve gyroscope performance.
- Understanding spin rate effects is crucial for advanced angular rate sensor design.
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