Capacitive Micromachined Ultrasonic Transducer (CMUT) ring array for transcranial ultrasound neuromodulation

Non-invasive brain stimulation of small animals plays an important role in neuroscience especially in understanding fundamental mechanisms of brain disorders. Here, we report a miniaturized ultrasound transducer array designed for non-invasive brain stimulation of mouse for the first time. We designed and fabricated a Capacitive Micromachined Ultrasonic Transducer (CMUT) ring array that operates at 183 kHz in immersion. The fabricated transducer ring array exhibited a focal length of 2.25 mm and a maximum intensity of 175 mW/cm². Because the array was fabricated in a ring shape, a natural focus was achieved and thus, no additional focusing circuitries or acoustic lens were required. Thus, a compact packaging was achieved with minimum surgical procedures for in vivo mouse experiments. Using the developed micromachined transducer array and simple packaging, we successfully induced the motor responses of a mouse. The success rate of ultrasound stimulation was quantified by recording the electromyography (EMG) signal during the stimulation. While the current ultrasound neuromodulation system is limited to acute experiments, the presented light (< 1 g) and compact ultrasound neuromodulation system with a natural focus would enable chronic ultrasound neuromodulation experiments on freely-moving mice.