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Analysis of Optical Plasma Monitoring in Plasma-Enhanced Atomic Layer Deposition Process of Al₂O₃

Muhammad Zeeshan Arshad1, Hyun Woo Tak1, Hyun Gi Kim2

  • 1Department of Electronics Engineering, Myongji University, Yongin, 17058, South-Korea.

Journal of Nanoscience and Nanotechnology
|November 25, 2018
PubMed

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