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Effect of Fluoride Ions on Wet Etching of Copper/ Molybdenum in Hydrogen Peroxide Solution

Jeong-Hyeon Kim1, Jin-Won Bae1, Jae-Young Park1

  • 1Department of Materials Engineering, Korea Aerospace University, 76, Hanggongdaehak-ro, Deogyang-gu, Goyang-si, Gyeonggi-do 10540, Republic of Korea.

Journal of Nanoscience and Nanotechnology
|November 25, 2018
PubMed

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