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Measurement of Quantum Interference in a Silicon Ring Resonator Photon Source
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High-Q inverted silica microtoroid resonators monolithically integrated into a silicon photonics platform
Optics Express
|November 25, 2018
Summary
We developed new silica microtoroid resonators integrated with silicon nanowaveguides. This advancement enables seamless connectivity for silicon photonics devices, achieving high quality factors for improved performance.
Area of Science:
- Photonics and Materials Science
- Nanotechnology and Microfabrication
Background:
- Silica microtoroid resonators are crucial optical components.
- Integrating resonators with silicon nanowaveguides presents fabrication challenges.
Purpose of the Study:
- To report the monolithic integration of reflown silica microtoroid resonators with silicon nanowaveguides.
- To enable connectivity with other silicon photonics devices through novel toroid geometry.
Main Methods:
- Fabrication of silica microtoroid resonators on a silica film.
- Integration with silicon nanowaveguides using an inverted toroid geometry.
- Utilizing standard microfabrication and laser-induced heating for processing.
Main Results:
- Achieved intrinsic quality factors up to 2 million.
- Demonstrated monolithic integration of resonators and nanowaveguides.
- Identified pathways for achieving quality factors exceeding 10^8.
Conclusions:
- The developed microtoroid resonators are compatible with monolithic co-fabrication.
- The inverted toroid geometry facilitates integration with silicon photonics.
- Further process improvements can lead to significantly higher quality factors.
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