Integrated optical frequency domain reflectometry device for characterization of complex integrated devices

Area of Science:

• Photonics
• Integrated Optics
• Optical Metrology

Background:

• Advanced measurement systems are crucial for modern photonic integrated circuits.
• Optical frequency domain reflectometry (OFDR) offers robust characterization of design-to-fabrication deviations.
• Existing methods may lack compactness or integrated functionality.

Purpose of the Study:

• To report a novel OFDR device with monolithic integration of the interferometric component and the device under test.
• To highlight the advantages of this integrated approach, including improved compactness and performance.
• To emphasize the significance of an incorporated dispersion de-embedding mechanism.

Main Methods:

• Monolithic integration of the OFDR interferometric system with the device under test.
• Development and implementation of a dispersion de-embedding mechanism.
• Experimental validation using an arrayed waveguide grating on a silicon nitride platform.

Main Results:

• Demonstration of a compact and high-performance integrated OFDR device.
• Successful characterization of design-to-fabrication deviations in an arrayed waveguide grating.
• Validation of the dispersion de-embedding mechanism's effectiveness.

Conclusions:

• The proposed integrated OFDR device represents a significant advancement in testing photonic integrated circuits.
• This work is a foundational step towards a universal test structure for integrated optical devices.
• The integrated approach offers a promising solution for efficient and accurate characterization in photonic manufacturing.