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Fabrication of hexagonal compound eye microlens array using DMD-based lithography with dose modulation.

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    A new maskless lithography method rapidly fabricates hexagonal compound eye microlens arrays (HCE-MLA). This technique precisely reconstructs microlens profiles for high-quality optical components.

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    Area of Science:

    • Optics and Photonics
    • Microfabrication Technologies
    • Materials Science

    Background:

    • Microlens arrays (MLAs) are crucial for optical systems, demanding high-precision fabrication.
    • Existing methods for fabricating hexagonal compound eye microlens arrays (HCE-MLAs) can be complex and time-consuming.
    • Digital micromirror device (DMD) based lithography offers potential for maskless, high-resolution patterning.

    Purpose of the Study:

    • To develop a rapid and efficient method for fabricating high-quality HCE-MLAs.
    • To utilize maskless lithography with dose modulation for precise microlens profile control.
    • To demonstrate the feasibility of the proposed fabrication technique through experimental validation.

    Main Methods:

    • Employing a digital micromirror device (DMD) for maskless lithography to create a hexagonal base structure.
    • Utilizing an equal-arc-mean slicing strategy for dose modulation to reconstruct variable microlens curvatures.
    • Layer-by-layer lithography and subsequent thermal reflow to achieve smooth, high-quality HCE-MLA surfaces.

    Main Results:

    • Experimental fabrication of HCE-MLAs demonstrated good agreement between designed and actual profiles.
    • Increasing the number of slicing layers during lithography significantly improved the profile quality.
    • The developed method achieved high-quality HCE-MLAs with smooth surfaces.

    Conclusions:

    • The proposed maskless lithography technique is a feasible and convenient approach for rapid HCE-MLA fabrication.
    • Dose modulation and layer-by-layer reconstruction are effective for achieving precise microlens surface profiles.
    • This method offers a promising pathway for producing advanced optical components with complex geometries.