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Graphene-Assisted Quasi-van der Waals Epitaxy of AlN Film on Nano-Patterned Sapphire Substrate for Ultraviolet Light Emitting Diodes
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Graphene-Assisted Quasi-van der Waals Epitaxy of AlN Film on Nano-Patterned Sapphire Substrate for Ultraviolet Light Emitting Diodes

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Suppressing the Initial Growth of Sidewall GaN by Modifying Micron-Sized Patterned Sapphire Substrate with

Wen-Yang Hsu1, Yuan-Chi Lian2, Pei-Yu Wu3

  • 1Department of Materials Science and Engineering, National Chaio Tung University, Hsinchu 300, Taiwan. j06900397@hotmail.com.

Micromachines
|November 30, 2018
PubMed

Keywords:
growth of GaNmicron-sized patterned sapphire substratesidewall GaN

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