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Analysis on Self Heating Effect for a Trenched Source/Drain Structure in Triple-Stacked Nanowire FET

Hyunsuk Kim1, Do-Kyun Son1, Ilho Myeong1

  • 1Inter-University Semiconductor Research Center (ISRC) and the Department of Electrical and Computer Engineering, Seoul National University, Seoul 151-747, South Korea.

Journal of Nanoscience and Nanotechnology
|November 30, 2018
PubMed

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