A hybrid probe system for quantifying plasma parameters in a 13.56 MHz capacitive coupled magnetized plasma

Area of Science:

• Plasma physics
• Radio-frequency discharges
• Diagnostic techniques

Background:

• Characterizing magnetized plasma parameters is crucial for understanding various applications.
• Capacitive coupled radio-frequency (RF) discharges are widely used in industrial processes.
• Accurate plasma density measurements are essential for process optimization.

Purpose of the Study:

• To develop and validate a hybrid probe for characterizing magnetized plasma parameters.
• To compare the hybrid probe's performance against a standard resonance hairpin probe.
• To investigate the probe's behavior under varying magnetic field strengths.

Main Methods:

• A hybrid probe combining dual cylindrical and emissive probes was designed.
• The probe was utilized in a 13.56 MHz capacitive coupled RF discharge.
• Plasma density measurements were performed in a push-pull configuration.
• Results were cross-verified using a standard resonance hairpin probe.

Main Results:

• The hybrid probe demonstrated good agreement with the hairpin probe at weak magnetic fields.
• Deviations in plasma density measurements were observed as the magnetic field strength increased.
• A discussion was provided to elucidate the reasons for these deviations.
• The advantages of the hybrid probe over conventional triple Langmuir probes in RF plasma were highlighted.

Conclusions:

• The developed hybrid probe is a viable tool for magnetized plasma characterization.
• Understanding the influence of magnetic fields on probe measurements is important.
• The hybrid probe offers potential advantages for RF plasma diagnostics.