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Development of a Micro/Nano Probing System Using Double Elastic Mechanisms
Rui-Jun Li1, Peng Xu2, Peng-Yu Wang3
1School of Instrument Science and Opto-electronics Engineering, Hefei University of Technology, Hefei 230009, China. RJ-Li@hfut.edu.cn.
Sensors (Basel, Switzerland)
|December 6, 2018
Summary
A new compact microprobe enhances coordinate measurement machine precision. It uses dual elastic mechanisms and differential signals to minimize signal coupling for accurate 3D measurements.
Area of Science:
- Metrology and Instrumentation
- Mechanical Engineering
- Optical Sensing
Background:
- Coordinate measurement machines (CMMs) require high-precision probes for accurate 3D measurements.
- Signal coupling in microprobe systems can compromise measurement accuracy.
- Existing microprobe designs may face challenges in separating motion signals.
Purpose of the Study:
- To design a compact microprobe for high-precision 3D measurements in CMM systems.
- To reduce signal coupling interference during the probing process.
- To develop and validate a microprobe with enhanced sensitivity and decoupling capabilities.
Main Methods:
- Designed a microprobe utilizing two separated elastic mechanisms for horizontal and vertical motion.
- Employed quadrant photodetectors to generate differential signals for motion separation.
- Developed sensitivity models for horizontal and vertical directions and established mathematical models for three-axis signal decoupling.
- Utilized a connecting rod to transfer vertical displacement between elastic mechanisms.
Main Results:
- Established and experimentally verified sensitivity models for the microprobe in both horizontal and vertical directions.
- Successfully analyzed and modeled signal coupling across three axes, proposing effective decoupling strategies.
- Experimental verification confirmed the effective probing performance and accuracy of the designed microprobe.
Conclusions:
- The designed compact microprobe effectively achieves high-precision 3D measurements for CMM systems.
- The dual elastic mechanism and differential signal approach successfully mitigate signal coupling issues.
- The developed mathematical models and experimental validation confirm the probe's enhanced sensitivity and decoupling performance.
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