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Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
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A valley valve and electron beam splitter

Jing Li1, Rui-Xing Zhang1, Zhenxi Yin1

  • 1Department of Physics, The Pennsylvania State University, University Park, PA 16802, USA.

Science (New York, N.Y.)
|December 8, 2018
PubMed

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